GLANZOX E-SERIES - Edge Polish


GLANZOX E-Series high-efficiency polish is used for mirror finishing of wafer edge surfaces. It is comprised of colloidal silica dispersed in a liquid composed of special ingredients, and is superior in terms of cleanability after polishing.

Typical Physical Properties of GLANZOX E-Series

Product Physical Properties
Main Component Content of SiO2 pH Specific Gravity Average Particle Size (nm) Wafer Types
E301 SiO2 35 11.5 1.24 55 Bare Silicon and Oxide
E303 Pure SiO2 35 10.6 1.24 55 Bare Silicon and Oxide
E304 Pure SiO2 40 11.6 1.28 35 Bare Silicon

 

Product Stats:

Category:
Polishing

Application:
Edge Mirror Polishing, Silicon Wafer Edge

Type:
Silicon Polish, Polishing Slurry

Material:
colloidal silica