GLANZOX E-Series high-efficiency polish is used for mirror finishing of wafer edge surfaces. It is comprised of colloidal silica dispersed in a liquid composed of special ingredients, and is superior in terms of cleanability after polishing.
Typical Physical Properties of GLANZOX E-Series
|Main Component||Content of SiO2||pH||Specific Gravity||Average Particle Size (nm)||Wafer Types|
|E301||SiO2||35||11.5||1.24||55||Bare Silicon and Oxide|
|E303||Pure SiO2||35||10.6||1.24||55||Bare Silicon and Oxide|
|E304||Pure SiO2||40||11.6||1.28||35||Bare Silicon|